Abstract

We have succeeded in attaching deoxyribo nucleic acid (DNA) molecules to a semiconducting Si substrate by adding MgCl2 to the DNA solution. The optimum concentration of MgCl2 solution to form the DNA network structure is 0.05 to 0.5 mM. Furthermore, it is found that DNA molecules attach to a hydrophilic SiO2 surface but not to a hydrophobic SiH surface. This result indicates that it is possible to fabricate micropatterning on a Si surface by using a DNA template and photolithography.

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