Abstract
The data of the X-ray photoelectron spectroscopy and reflection high-energy electron diffraction studies of the formation of the GaAs-Ge heterointerface under incomplete removal of all oxide phases from the GaAs substrate surface are presented. It is shown that the combination of the processes of final Ga2O desorption and Ge deposition allows one to avoid the evaporation of As and the stoichiometry distortion near the interface.
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