Abstract
Micro- and nanostructures improved different surface properties, which is used in various fields of science and technology. It is of a great interest to develop the physical foundations of new effective methods for creation of such structures. The paper proposes a method of direct laser micro- and nanostructuring based on nanosecond lasers with radiation of UV and VUV range. The method allows surface laser treatment of materials with different physical properties: metallic alloys, ceramics, diamond-like films, semiconductors. Formation of surface micro and nanostructures on the surfaces of diamond-like film, germanium, aluminum oxide and zirconium bronze is demonstrated. A theoretical model of nanostructure formation on solid surface melted by nanosecond laser pulse is considered. Moreover, a simple model for formation of conical structures at laser ablation without melting is described.
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