Formation of submicron periodic structures on polymer surfaces at subthreshold fluence

Abstract

In a new regime of irradiation that uses a polarized excimer laser beam of low subthreshold fluence, periodic modifications of submicron size aligned parallel to the electric field are formed on nominally smooth surfaces. Several polymers, that have in common to be highly absorbing, have been patterned with 193 nm or 248 nm radiation of the excimer laser. These self‐developing structures result from the interference of the incident wave with a surface scattered wave, as demonstrated by the angle of incidence dependence. Various applications are anticipated owing to the high efficiency of the process. In particular, it requires a low dose and it is highly controllable.