Abstract

Directional solidification of eutectics has self assembly characteristics that can fabricate two dimensional periodic arrays of two or more phases. The ordering of the phases can be utilized as a lithographic to produce parats structures for fabrication of miniature devices. Directional solidification by the Bridgman technique was applied to the eutectic system Si-TiSi 2 . Patterned growth of TiSi 2 rods occur in the silicon matrix during solidification. Micro-channel strucaure of pilar arrays of TiSi 2 was produced by silicon dissolution by KOH. Average rod diameter was 2.5 μm with 99% of the population falling in the 2-3 μm range. The inter-rod spacing ahowed small dependence upon growth rate, varying from 4.3 μm to 5.7 μm. Colony fomution could not be alppraaed for composition at and around the eutectic invariant point due to low thermal gradiont to growth rate ratio and contarmination from the crucible.

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