Formation of periodic structure on amorphous silicon films by femtosecond laser pulses

A V Dostovalov,E Mitsai,S A Babin,A.A Kuchmizhak,V P Korolkov,K A Bronnikov

doi:10.1109/iclo48556.2020.9285402

Formation of periodic structure on amorphous silicon films by femtosecond laser pulses

A V Dostovalov, E Mitsai + Show 4 more

https://doi.org/10.1109/iclo48556.2020.9285402

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Publication Date: Nov 2, 2020

Citations: 2

Affiliation: Novosibirsk State University, Institute of Automation and Electrometry, Institute of Chemistry, Far Eastern Branch of the Russian Academy of Sciences, Institute of Automation and Control Processes, Far Eastern Federal University

#Formation Of Periodic Structure #Amorphous Silicon Films + Show 8 more

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Abstract

In this paper, we report formation of laser-induced periodic surface structures (LIPSS) on amorphous silicon (a-Si) films of various thickness by their lateral scanning with fs laser pulses shaped to astigmatic Gaussian beam. Diverse LIPSS morphologies with characteristic periods ranging from 150 to 1000 nm were found to form upon variation of scanning speed and laser power.

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