Formation of Particle Flows from a Beam Plasma Generated by a Forevacuum Plasma Electron Source

Abstract

Beam-plasma technologies are currently successfully used for surface treatment of various materials, coating deposition, plasma-stimulated synthesis and decomposition of inorganic and organic compounds. The most interesting for application is a highly nonequilibrium beam plasma, because it has high chemical activity and ease of control of its parameters due to the variation of the parameters of the electron beam used for its generation. The current stage in the development of beam-plasma technologies has allowed the creation of plasma generators for various applications - from microelectronics to medicine. In this work, a beam plasma generator is described that operates at pressures of 10–50 Pa and allows the generation of a plasma with the concentration of $2\cdot 10^{16} \mathrm{cm}^{-3}$ and the temperature of 5 eV. The main feature of the generator is the use of a forevacuum plasma electron source for gas ionization and beam plasma generation. The effect of ion treatment from such a plasma on the optical and surface properties of polypropylene is determined. It is shown that after processing, the absorption in the ultraviolet region increases, and the hydrophilicity of the material also increases.