Abstract
In the event of a hydrogen leak accident, an explosion occurs at a concentration of 4% or more in the atmosphere, so, the technology to accurately measure the hydrogen detection near the 5% area is very important. Among the various hydrogen detection methods, a hydrogen sensor using a fine pattern of Pd with excellent ability to absorb hydrogen is very suitable for this purpose. In this study, in forming a micropattern of Pd metal, a technique for easily fabricating Pd micropatterns was proposed by utilizing micro-cracks generated in the process of forming a ceramic thin film on a polymer substrate. It showed very accurate detection capability at the 1–5% hydrogen concentration level, and it is expected that it can be easily applied to various curvature environments as it is manufactured on a polymer substrate.
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