Abstract
Gamma-ray irradiation effects on MOS structures formed on the silicon and the carbon faces of 6HSiC are examined by using high frequency capacitance-voltage method. The accumulation of radiation-induced trapped charges in the oxide near the interface depends on not only the gate bias polarity during irradiation but also the face type of 6HSiC. The fomation mechanisms of the trapped charges are discussed in conjunction with the face type and the bias polarity.
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