Abstract

Gamma-ray irradiation effects on MOS structures formed on the silicon and the carbon faces of 6HSiC are examined by using high frequency capacitance-voltage method. The accumulation of radiation-induced trapped charges in the oxide near the interface depends on not only the gate bias polarity during irradiation but also the face type of 6HSiC. The fomation mechanisms of the trapped charges are discussed in conjunction with the face type and the bias polarity.

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