Formation of Multilayer Structures with Integrated Membranes Based on Porous Silicon

Abstract

Multilayer integrated porous membranes are obtained in a monolithic frame containing two types of porous silicon: macroporous silicon with pore diameters up to 10 μm and channel silicon with channel diameters from 100 to 300 nm. A laboratory technology is proposed for preparing macroporous/channel silicon two-layer structures with the use of high-resistance n-Si substrates (1 Ω cm). The pore-formation mechanism and its effect on the morphology of porous layers for electrolytes using formic acid and ammonium hydroxide are discussed.