Abstract

In this work we obtained the gaps less than 5 nm wide in the thin (15 nm) gold films. These gaps can be used for the creation of the room-temperature single-electron transistor. We demonstrated the need of deposition of Au without an adhesive layer and elaborated the technique of the creation of thin (15 nm) and narrow (200 nm) gold electrodes on Al<sub>2</sub>O<sub>3</sub>. It provides a sufficient adhesion of Au film even without a buffer layer and subsequent successive gap implementation.

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