Formation of Micro‐Patterned Ga2O3/Se Heterojunction and its Application to Highly Sensitive Avalanche Photodiode

Abstract

Micropatterned Heterojunction Photodiodes In article number 2200636, Yusuke Adachi and Taizo Kobayashi developed micropatterned photodiodes using selenium thin films which exhibit high optical absorption at visible wavelengths. Ga2O3/Se heterojunction avalanche photodiodes are miniaturized to square-shaped micropatterns at 100 μm2. Photocurrent density is increased with decreasing the active area, and the highest external quantum efficiency of 330% is observed at a bias voltage of 15 V at the active area of 100 μm2.