Abstract
We have used coaxial impact collision ion scattering spectroscopy (CAICISS), low energy electron diffraction (LEED) and X-ray photoelectron spectroscopy (XPS) to investigate the influence of atomic hydrogen cleaning (AHC) on the composition and structure of MBE grown InN(0001) surfaces. Evaluation of the CAICISS data showed that metallic In droplets formed during non-optimised AHC, while LEED indicated a well ordered surface and XPS revealed residual C and O contaminations. Careful comparison of simulated and experimental polar angle scans of the CAICISS data revealed that the observed polar angle peak at 58° is solely related to the formation of metallic In on the InN surface.
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