Formation of iron silicide on Si(001) studied by high resolution Rutherford backscattering spectroscopy

Abstract

The initial stage of the formation of iron silicides has been investigated by high resolution Rutherford backscattering spectroscopy (HRBS). Just after Fe is deposited on Si(001) at room temperature, the deposited Fe atoms dig themselves into subsurface ejecting Si atoms into outer surface. Upon annealing at 300–400 °C, significant number of Si atoms are displaced from their lattice position near the interface between the crystalline Si and the Fe–Si mixing layer. Such displaced Si diffuses into the Fe–Si mixing layer and forms the layer with the composition of Fe:Si≈1:2. This layer is considered to be a precursive state of FeSi 2.