Formation of intermetallic layers at high intensity ion implantation

Abstract

The experimental results are presented on a study of intermetallic phase formation in the surface zone of metal target at high intensity ion implantation. High intensity ion implantation allow to obtain the surface-alloyed layers of a much greater thickness in comparison with ‘ordinary’ ion implantation. Pure polycrystalline nickel was chosen as the target. The nickel samples were irradiated with the aluminum ions using the vacuum-arc ion beam and plasma flow source ‘Raduga-5’. The RBS and TEM were used for the investigations presented. It was established that the fine dispersed intermetallic precipitates are formed in the surface alloyed nickel layer. The alloyed layer thickness is equal to 150 nm and more, while the ion projected range that is equal to 70 nm. Compositions of these intermetallic precipitates are close to Ni 3Al and NiAl phases. The solid solution of aluminum in nickel is also formed. The depth dependence of the formation of intermetallic phases can be deduced from the Ni–Al phase diagram.