Formation of Interconnects with Carbon Nanotubes by Nano-Patterning and Acoustics-Assisted Alignment

Abstract

In this work, the feasibility of self-assembling double-walled carbon nanotubes (DWCNTs) to form nano-sized interconnects over pre-fabricated gold electrodes using a combination of nanopatterning, surface functionalization and acoustics-assisted alignment of the DWCNTs was studied. Self-assembly and concurrent alignment of DWCNTs over the gold electrodes on selectively functionalized surfaces within nano-patterns took place in a fluid medium with the potential scalability for wafer-sized mass production. The adverse impacts of curvature and misalignment of DWCNTs on the chance of their attachment to the target zones were analyzed. Microscopic observations and electrical I-V curve measurements verified that DWCNT interconnects were indeed formed. The results indicated that the fabrication of self-assembled interconnects through the combined usage of nano-patterning, surface functionalization and DWCNT alignment is feasible and is in the right direction towards the fabrication of interconnects for future carbon nanotube-based devices and circuits.