Abstract

This investigation presents the results of experimental investigation and theoretical simulations of the influence of plasma and negative bias parameters on formation, transportation and focusing of high intensity ion beams of titanium and nitrogen (with an ion current density up to 1 A/cm2 and pulsed power density up to 2.6 kW/cm2). It was shown that the conditions of space charge neutralization of the focusing beam have a significant influence on the distribution and magnitude of the ion current at the collector.

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