Abstract
Multi-element equiatomic single-phase thermodynamically stable substitutional solid solutions (high-entropy alloys) have a unique combination of mechanical, tribological, physical and other properties. The purpose of this research is to develop an ion-plasma method for the formation of high-entropy alloys. A method for the formation of high-entropy alloys has been developed, which consists in the deposition of a multi-element metal plasma on a substrate in a vacuum. Plasma is formed by vacuum-arc plasma-assisted simultaneous independent sputtering of the cathodes of the selected elements. The modes allowing synthesizing thin Ti-Al-Nb-Zr films with a composition close to equiatomic were revealed. The presence of droplet fraction particles of various elemental composition in the films was found. It is shown that the phase composition of the films depends on the concentration of elements in the plasma.
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