Abstract
The unique aspect of the ionized cluster beam (ICB) thin film depositionmethod is that material is deposited from a beam of atom clusters, a fraction of which are ionized and accelerated to the substrate. A large number of different material films have been deposited to research the ICB method and advantages in film formation have been claimed. However, because methods for measuring cluster size distribution in film deposition instruments have been under development, the presence of clusters in the depositing beam normally has been inferred from theory rather than measured directly. Thus it is not yet clear whether interesting ICB film effects were due to clusters or other factors. A new measurement method which overcomes many of the difficulties of previous methods is developed in this work. Gold clusters up to an average of 3 gold atoms per ionized cluster have been formed and detected. Cluster size increased with crucible pressure and attempts to achieve larger clusters are underway.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.