Abstract

Controllable polymer micropatterns, served as indispensable function structures, are extensively required in many micro/nano scientific areas and engineering applications. Exploring advanced methods of fabricating micropatterns is always a research hotspot. In this article, we introduce a novel method of patterning polymer by the electro-dewetting induced by corona discharge. For the first time, it is observed experimentally that liquid polymer on conductive/non-conductive patterned substrates, spontaneously converges from non-conductive areas to conductive areas under the action of ion wind. Taking advantage of such a flow phenomenon, controllable polymer micropatterns including microbump arrays and microwell arrays are fabricated successfully. Their sizes range from hundreds of microns to millimeters. Micropattern surfaces present an ultra-smooth characteristic, with roughness in the nanometer range.

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