Formation of complex features using electron-beam direct-write decomposition of palladium acetate

Abstract

A focused electron beam has been used to selectively decompose thin films of palladium acetate, (Pd–Ac), resulting in the formation of ≤50 nm wide conductive Pd-rich features. The formation of features from various film thicknesses of Pd–Ac has been investigated using a wide range of electron energies. Monte Carlo simulations of electron energy loss distributions in Pd–Ac films were calculated over a wide range of film thicknesses and electron energies. The Monte Carlo calculations were used to predict the volume over which the energy of the electron beam is deposited within the films. Thin conductive wires having profiles from high aspect ratio to almost circular cross sections produced by varying the electron beam energy were in agreement with the Monte Carlo predictions. Complex multilayer Pd–Ac features were then fabricated by performing overlapping exposures of Pd–Ac films with differing electron beam energies.