Abstract

The features of the change in the chemical state of the surface layers of commercially pure titanium under the action of a high-power ion beam (HPIB) were investigated using X-ray photoelectron spectroscopy (XPS). It has shown that HPIB irradiation leads to the interaction of titanium with carbon and nitrogen adsorbed on the surface and the formation of chemical compounds. The influence of the number of HPIB irradiation pulses on the formation of oxycarbonitride compounds in the surface layers of titanium has been established. Three possible mechanisms of the formation of titanium oxycarbonitride compounds during HPIB irradiation were considered: the interaction of molten titanium with adsorbed nitrogen and carbon-containing surface contaminants; the interaction of the evaporated titanium with the components of the residual atmosphere of the vacuum chamber, followed by the deposition of the resulting compounds on the surface and carbothermal reduction of the oxidized surface layer of titanium.

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