Abstract
Channel waveguide with grating is fabricated in nonlinear optical (NLO) polymer thin films by means of simultaneous embossing and photobleaching. A combined structure of mask/master consisting of a photomask part and a grating die part which is made of polyimide is fabricated. Then the mask/master is set on the NLO polymer films and both embossing and photobleaching are performed simultaneously. Profiles of the replica grating and the channel waveguide are estimated.
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