Abstract
The structural property and interfacial morphology have been investigated for the Ca 2Si/Mg 2Si interface. The Ca 2Si layers were grown on Mg 2Si layers by heat treatment of the Mg 2Si/Si substrates in Ca vapor. It is found that the CaMgSi phase is formed at the Ca 2Si/Mg 2Si interface. The structural property of the resultant silicides was examined by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The chemical composition of the layers was examined by energy dispersion spectroscopy (EDS). In addition, the chemical analysis by X-ray photoelectron spectroscopy (XPS) revealed the Mg segregation on the silicide surface. The growth mechanism of Ca 2Si on Mg 2Si/Si is also discussed.
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