Abstract
High-energy oxygen ions were implanted with fluences from 2.5×1017 up to 1.5×1018 O+-ions/cm2 into molybdenum at temperatures between −60°C and room temperature. Subsequent annealing processes were carried out at 500°C up to 60 min. The chemical composition was investigated using Rutherford backscattering spectrometry. The concentration distribution of the implanted oxygen is characterized by two kinds of profiles: gaussian profiles are observed, when the fluence is lower than the critical fluence required to form a buried molybdenum oxide layer, and a concentration plateau, when the fluence exceeds this critical concentration. Annealing reinforces the tendency to form a flat-topped distribution. Electron and X-ray diffraction studies show that the molybdenum oxide phase δ-MoO2 is formed during annealing. Cross-sectional TEM studies of the as-implanted and annealed oxygen implanted molybdenum are presented. After implantation a buried amorphous layer between strongly damaged material could be found in the near surface region. With increasing annealing time different oxide precipitate morphologies and a buried molybdenum oxide layer covered by an amorphous layer is formed.
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