Abstract

The results of studying the X-ray photoelectron spectroscopy of the chemical composition of nickel surface layers with a deposited aluminum film, depending on the dose of irradiation with argon ions, are presented. Analysis of the spectra shows the formation of Ni3Al aluminide during ion-beam mixing. The highest content (~20%) of this compound in the modified layer is observed at an implantation dose of 5 × 1016 cm–2.

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