Abstract
Organic light-emitting diode (OLED) displays are rapidly replacing liquid crystal displays (LCDs) in mobile devices, due to their rapid response time, wide viewing angle, and high color purity. In addition, OLEDs can be made much thinner and lighter than LCDs, since they do not need a separate backlight unit. Thus, OLED displays are the most suitable for portable devices. In spite of the major advances, the environmental stability of OLEDs still remains a major obstacle to their widespread use. Since the organic materials and lowwork-functionmetalsusedinOLEDsaresensitivetomoisture,OLED displays are easily degraded in humid environments. 1,2 Encapsulation isthereforeessentialforprotectingOLEDsfromthemoistureandoxygen present in ambient air. Heavy and stiff shielding glass is currently used for encapsulation, but its usage is clearly limited for mobile and flexible displays. Encapsulation with organic or inorganic thin films has been actively researched, but a material that satisfies the challenging requirement of low water permeability (< 10 −6 g/m 2 ·day) has not yet been found. 3 Inorganic thin films show better resistance to water permeation than organic films, but many defects are generated during the film deposition, and easily act as permeation paths. 4 There are two approaches to improve the encapsulation performance of inorganic thinfilm barriers. One is reducing the size and population
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