Abstract
Pulsed laser annealing has been applied on 57Fe/Si(1 0 0) layers in order to study the formation of iron silicides after irradiation with a XeCl excimer laser. The 57Fe layers were produced by pulsed laser deposition. The number of pulses and the fluence were varied. FeSi, β-FeSi 2 and metastable γ-FeSi 2 phases have been observed after irradiation. Subsequent thermal annealing leads to the presence of a pure β-FeSi 2 surface layer. Rutherford backscattering spectrometry and conversion electron Mössbauer spectroscopy characterized the irradiated layers.
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