Formation mechanism of horizontal-half-loop arrays and stacking fault expansion behavior in thick SiC epitaxial layers

Abstract

The formation mechanism of half-loop arrays (HLAs) that form parallel (horizontal) to the step-flow direction in 120 μm thick 4H-silicon carbide (SiC) epitaxial layers was investigated using ultraviolet photoluminescence (UVPL) imaging and x-ray topography (XRT). The horizontal-HLAs are generated by the multiplication and glide of basal plane dislocation (BPD) loops that are created within the epitaxial layer. The BPD loops were initiated after ∼40–50 μm of growth from a small BPD segment, which glides toward the surface as well as the substrate interface. BPD multiplication occurs and several loops are generated. Some of these loops are terminated by the growth front and create HLAs due to the 4° offcut of the wafer. XRT images show that successive BPD loops interact with previously generated HLA segments. Successive loops also interact with the moving growth front and create new HLAs that are spatially displaced from the previous HLA segments. These appear as a string of horizontal-HLAs in the UVPL images. The expansion of stacking faults (SFs) from these horizontal-HLAs was investigated, and we show that they all lie on the same basal plane. The complex defect structure is created in the epitaxial layer from a single BPD loop but extends over a large (∼5 × 0.5 cm2) region of the SiC wafer during epitaxial growth. The high density of HLAs and BPDs would generate several SFs upon device operation leading to severe device degradation.