Abstract
Neutral species ejected from single crystals of ZnS, CdS, and FeS{sub 2} during ion bombardment by 3 keV Ar{sup +} were detected by laser post-ionization followed by time-of-flight mass spectrometry. While metal atoms (Fe, Zn, Cd) and S{sub 2} were the dominant species observed, substantial amounts of S, FeS, Zn{sub 2}, ZnS, Cd{sub 2}, and CdS were also detected. The experimental results demonstrate that molecules represent a larger fraction of the sputtered yield than was previously believed from secondary ion mass spectrometry experiments. In addition, the data suggest that the molecules are not necessarily formed from adjacent atoms in the solid and that a modified form of the recombination model could provide a mechanism for their formation.
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