Formation features of composite coatings based on titanium nitride by method of vacuum-arc evaporation and magnetron sputtering

Abstract

The paper studies the structure and properties of TiN and TiN-Cu coatings obtained by a hybrid technology of vacuum arc evaporating of a titanium target and ion-plasma sputtering of a copper target. The experiments were carried out in a plasma-chemical reactor of new-design with the possibility of injecting copper vapor into the region of TiN synthesis through a separating diaphragm with a variable metering aperture.