Abstract
O( 5S) metastable atom production is studied in a microwave induced plasma (2450 MHz, 320 W) as a function of pressure (0.5 to 10 Torr) and oxygen concentration in helium (0 to 15 % O 2). O( 5S) and He( 3S) densities, electron temperature and electron density are determined. Measurements are performed by optical absorption for metastable species and by double probes for electron temperature and density. Results show that: -O( 5S) density increases and reaches a maximum with increasing pressure and increasing oxygen concentration, then decreases, while He( 3S) decreases continuously; -electron temperature decreases with oxygen concentration and with pressure; -electron density variation is a weak function of oxygen concentration and increases with pressure. According to the results obtained a mechanism for O( 5S) production and destruction is proposed. Assuming a steadystate, the quenching rate constant of O( 5S) by O 2 was estimated to be: (1.2 ± 0.4) × 10 −10 cm 3 molecule −1 s −1.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
