Abstract
Experimental data on ion synthesis of nanocomposite layers with carbonrich clusters and silicon nanocrystals by irradiation of nonstoichiometric silicon oxide (SiOx) films with carbon ions followed by high� temperature annealing are reported. It is shown that, at rather high doses of C + ions, the resulting films exhibit photoluminescence with a spectrum that encompass the entire visible and nearinfrared regions. The formation of carbonrich clusters and silicon nanocrys tals is confirmed by Xray photoelectron spectroscopy data. The distribution of carbon practically reproduces the calculated profile of ion ranges, suggesting that there is no noticeable diffusive redistribution of carbon. A qualitative model of the layered structure of ion� synthesized structures is suggested. DOI: 10.1134/S106378261011014X
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