Abstract
To improve the surface quality and laser damage resistance of Potassium Dihydrogen Phosphate (KDP) crystal processed by single point diamond fly-cutting (SPDF) technique, formation and suppression of KDP surface defects are investigated. Firstly, multiple measuring methods have been utilized to characterize KDP surface defects. According to their structure and chemical characters, KDP surface defects were classified into four categories and forming reason of each was analyzed. Based on these analysis results, theoretical model for describing the formation process of KDP surface defects was established and conditions for achieving defects-free KDP surfaces were proposed. Finally, flycutting experiments were carried out to verify the effect of the defects suppression measures. Experiment results indicate that smooth KDP surface with roughness less than 2 nm can be obtained and KDP surface defects can be suppressed effectively by applying the proposed methods.
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