Abstract
The morphology and density of InGaN nanoislands can be controlled by the choice of proper growth conditions for metal organic vapor phase epitaxy. Scanning tunneling microscopy has been used to investigate the dependence of InGaN island morphology on the growth parameters. A heterogeneous nucleation of large InGaN islands with a complex structure is observed after growth at 650°C in conjunction with a high In partial pressure. For 600°C and low In partial pressure, however, the homogeneous nucleation of small islands of sizes suitable for three-dimensional quantum confinement is found, with very high densities of 1012cm−2. The influence of the growth temperature and the In partial pressure is discussed in terms of thermally activated diffusion and surface mobility.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
