Abstract
In order to generate high-energy densities of 13.5nm radiation, an extreme ultraviolet (EUV) Schwarzschild mirror objective with a numerical aperture of 0.44 and a demagnification of 10 was developed and adapted to a compact laser-based EUV source. The annular spherical mirror substrates were coated with Mo∕Si multilayer systems. With a single mirror reflectance of more than 65% the total transmittance of the Schwarzschild objective exceeds 40% at 13.5nm. From the properties of the EUV source (pulse energy 3mJ at 13.5nm and plasma diameter approximately 300μm), energy densities of 73mJ∕cm2 at a pulse length of 6ns can be estimated in the image plane of the objective. As a first application, the formation of color centers in lithium fluoride crystals by EUV radiation was investigated. F2, F3, and F3+ color centers could be identified by absorption spectroscopy. The formation dynamics was studied as a function of the EUV dose. By imaging of a pinhole positioned behind the plasma, an EUV spot of 5μm diameter was generated, which accomplishes direct writing of color centers with micrometer resolution.
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