Abstract
Pt-containing high entropy alloy films (HEAFs), FeCoNiCuxPtx (x = 0.2, 0.4, 0.6, 0.8, 1.0), have been prepared from multilayer precursors using a two-step method involving magnetron sputtering deposition and vacuum annealing. It has shown that through vacuum annealing at elevated temperatures, complete mixing of the multilayer component can be realized to form uniform high entropy alloy films. By changing their concentrations, the effects of Pt and Cu on microstructure and magnetic properties of FeCoNiCuxPtx HEAFs have been systematically investigated. The results show that FeCoNiCuxPtx HEAFs are of disordered FCC solid solution structure, exhibiting soft ferromagnetic behavior and strong in-plane magnetic anisotropy. FeCoNiCu0.2Pt0.2 HEAFs, with MS = 802 emu/cm3, HC = 52.0 Oe, HK = 2.3×104 Oe, and ρ =3.8×10−7 Ω·m, are suitable for application as the core material of high frequency thin film inductors. It is found that Pt-containing HEAFs show relatively high saturation magnetization due to the fact that Pt-containing HEAFs tend to have larger lattice parameter, which may promote the exchange interaction among the magnetic Fe, Co and Ni atoms in FeCoNiCuxPtx HEAFs. This result is further supported by DFT calculations.
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