Abstract

The effects of interface structure on the formation and characteristics of a LaB 6/chemically etched GaAs(001) Schottky barrier have been investigated using current-voltage measurements, high energy ion scattering and X-ray photoelectron spectroscopy. Barrier heights are 0.7 eV for as-deposited samples and 0.9 eV after annealing at 400–800°C. Annealing above 400°C causes reduction of GaAs native oxides and relaxation of interface disorder. This interface structure is found to determine the pinning position of the Fermi level.

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