Abstract
Theoretical work was performed to investigate the formation and cascading decay of hollow Ar atoms during the interaction near a surface of Si. To exhibit the static aspect of hollow atom formation below the surface, the density functional theory was applied to evaluate results for electron charge density plots of atomic orbitals. To study the dynamic properties of hollow Ar atoms, a complex cascade model was developed treating the successive filling of the K, L, and M shells via Auger transitions and collisional charge transfer above the surface and in the bulk. Information is provided for the above- and below-surface contributions in previous experiments of Ar 17+ impact on SiH using high-resolution x-ray spectroscopy. Clear evidence is given that the velocity-dependent filling of the M shell plays a significant role.
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