Forescattered electron imaging of nanoparticles in scanning electron microscopy

Abstract

In this study, we have used a Zr-Nb alloy containing well-defined nano-precipitates as a model material in which to study imaging contrast inversions (atomic number or diffraction contrast) observed with the forescattered electron imaging system, ARGUS™, in a scanning electron microscope (SEM) when imaging a thin foil in a transmission geometry. The study is based on Monte Carlo simulations and analysis of micrographs experimentally acquired under different imaging conditions. Based on the results, imaging conditions that enhance atomic number or diffraction contrast have been proposed. Data acquired from the ARGUS™ imaging system in an SEM has also been compared with results from standard transmission electron microscopy and scanning transmission electron microscopy imaging of the same material. These results demonstrate the capability of the ARGUS™ system to investigate microstructures in nano-scale materials.