Focussed ion beam machined cantilever aperture probes for near‐field optical imaging

Abstract

Near-field optical probe is the key element of a near-field scanning optical microscopy (NSOM) system. The key innovation in the first two NSOM experiments (Pohl et al., 1984; Lewis et al., 1984) is the fabrications of a sub-wavelength optical aperture at the apex of a sharply pointed transparent probe tip with a thin metal coating. This paper discusses the routine use of focussed ion beam (FIB) to micro-machine NSOM aperture probes from the commercial silicon nitride cantilevered atomic force microscopy probes. Two FIB micro-machining approaches are used to form a nanoaperture of controllable size and shape at the apex of the tip. The FIB side slicing produces a silicon nitride aperture on the flat-end tips with controllable sizes varying from 120 nm to 30 nm. The FIB head-on drilling creates holes on the aluminium-coated tips with sizes down to 50 nm. Nanoapertures in C and bow tie shapes can also be patterned using the FIB head-on milling method to possibly enhance the optical transmission. A transmission-collection NSOM system is constructed from a commercial atomic force microscopy to characterize the optical resolution of FIB-micro-machined aperture tips. The optical resolution of 78 nm is demonstrated by an aperture probe fabricated by FIB head-on drilling. Simultaneous topography imaging can also be realized using the same probe. By mapping the optical near-field from a bow-tie aperture, optical resolution as small as 59 nm is achieved by an aperture probe fabricated by the FIB side slicing method. Overall, high resolution and reliable optical imaging of routinely FIB-micro-machined aperture probes are demonstrated.