Abstract
A magnetic mass analyzer is used to determine the beam composition of a vacuum arc ion source. In the analyzer, we used the concentric multi-ring electrodes to focus the intense and divergent ion beams. We describe the principle, design, and the test results of the focusing device. The diameter of the beam profile is less than 20 mm when the accelerating voltage is 30 kV and the focusing voltage is about 2.0 kV. The focusing device has been successfully used in the magnetic mass analyzer to separate Ti(+), Ti(2+), and Ti(3+).
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