Abstract
As per the growing needs of industry and research, Focused Ion Beam (FIB) nanofabrication has emerged as a highly suitable and promising approach in almost all domains of nanotechnology for producing 3D nanostructures and devices. The book chapter focuses on different types of ion sources which is the core component of FIB system. It also provides a comprehensive overview of various stages of FIB nanofabrication which include FIB etching, FIB irradiation, FIB deposition and FIB implantation. Additionally, application of FIB and future research trends are also mentioned. This chapter offers valuable guidance to researchers and engineers seeking to enhance their understanding of Focused Ion Beam Technology.
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