Abstract
Recent advances in foccused ion beam (FIB) technology, towards finer focus and higher current density, have made micromachining by FIB both an attractive ideal and a commercial reality. We demonstrate new applications in micro-electro-mechanical systems (MEMS) and sensors, high-resolution trimming of YBaCuO super-conducting devices, and transmission electron microscopy (TEM) sample preparation which rely on the precision milling and high resolution imaging available from FIB.
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