Abstract
Focused ion beam technology is combined with chemical etching of specifically designed fibers to create Fabry-Perot interferometers. Hydrofluoric acid is used to etch special fibers and create microwires with diameters of 15 μm. These microwires are then milled with a focused ion beam to create two different structures: an indented Fabry-Perot structure and a cantilever Fabry-Perot structure that are characterized in terms of temperature. The cantilever structure is also sensitive to vibrations and is capable of measuring frequencies in the range 1 Hz - 40 kHz.
Highlights
Focused Ion Beam (FIB) is a commercially available technology developed for, and mainly employed by, the semiconductor industry
FIB has been combined with optical fiber technology to create structures ranging from long-period [3] and fiber Bragg gratings for refractive index [4] and temperature [5] sensing to more complex structures such as fiber-top cantilevers for very small displacement sensing [6]
The Fabry-Perot structures were analyzed in a simple reflection setup consisting of an optically amplified spontaneous emission (ASE) broadband source @ 1550 nm, an optical circulator, and an optical spectrum analyzer
Summary
Focused Ion Beam (FIB) is a commercially available technology developed for, and mainly employed by, the semiconductor industry. FIB systems are very similar to Scanning Electron Microscopes (SEM), but instead of an electron beam they use an ion beam, generally of gallium ions (Ga+) [1] They can be operated with small currents for imaging just like the SEM systems, or with higher currents for milling and sputtering. The most common method is tapering, either by creating nanofibers or tapered fiber tips In our effort, another technique is used instead of tapering: hydrofluoric acid etching of designed fibers [12]. Another technique is used instead of tapering: hydrofluoric acid etching of designed fibers [12] This allows for the creation of microwires and reduces the FIB milling time necessary to create a structure. The other structure is a microwire cantilever FP structure and was characterized as a temperature and vibration sensor
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