Abstract
A specially designed coupled SEM/FIB system was used to realize high quality mirror facets in different laser structures. The dynamics of the ion milling were recorded and the geometrical effects of the ion bombardment were studied to optimize the working parameters. The light output characteristics of the GaAs and InP lasers obtained were measured. The optimized machining process was successfully applied to the realization of a monolithically integrated double heterostructure laser butt-coupled to its optical waveguide.
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