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Abstract
Focused ion beam techniques are one way to modify locally the properties of magnetic thin films. We report on structural investigations of 50 nm thick non-ordered nano-crystalline Permalloy (Ni81Fe19) films modified by 30 keV Ga+ focused ion beam (FIB) irradiation. From the x-ray diffraction (XRD) measurements a considerable crystallite growth and a material texturing towards (111)-direction with a linearly increasing lattice constant was observed. In addition, cross-sectional transmission electron microscope (XTEM) images show that crystallites are growing through the entire film at high irradiation fluences. Extended x-ray absorption fine structure (EXAFS) analysis shows a perfect near-order coordination corresponding to a face-centered (fcc) unit cell for both Fe, Ni and Ga atom surrounding. The structural changes are accompanied by a decrease of saturation polarization with increasing ion fluence. Such a behavior is attributed to the incorporation of non-magnetic Ga atoms in the Permalloy film.
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