Abstract
Three-dimensional nanostructure fabrication has been demonstrated by 30keV Ga+ focused-ion-beam chemical-vapor-deposition (FIB-CVD) using a phenanthrene (C14H10) source as a precursor. Microstructure plastic arts is advocated as a new field using micro-beam technology, presenting one example of micro-wine-glass with 2.75μm external diameter and 12μm height. The deposition film is a diamond like amorphous carbon. A large Young’s modulus that exceeds 600GPa seems to present great possibilities for various applications. Producing of three-dimensional nanostructure is discussed. Micro-coil, nanoelectrostatic actuator and nano-space-wiring with 0.1μm dimension are demonstrated as parts of nanomechanical system. Furthermore, filtering tool is also fabricated as a novel nano-tool for the manipulation and analysis of subcellular organelles.
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