Abstract
Micromachining techniques utilising optical, UV and X-ray photons, as well as electrons, low energy heavy ions and high energy light ions (protons), are briefly reviewed. The advantages and disadvantages of each process are discussed. High energy ion beam micromachining (proton micromachining) is a new process which exhibits a unique feature; direct-write 3-dimensional micromachining at submicron resolutions. Although this technique may not compete with conventional mask processes for producing high volume batch production of microcomponents, high energy ion beam micromachining may have a significant role in rapid prototyping, research into the characteristics of microstructures, and the manufacture of molds, stamps and thick masks. Several examples of high energy proton micromachining are presented to illustrate the potential of the technique.
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