Abstract
A gold LMIS has been used in the charged droplet emission mode with a single lens focusing column operating at 20 kV beam voltage to achieve a deposit size at the target of 2.3 to 6.0 depending on the exposure time. The net mass deposit rate maximized at 1.5 µm3/s. From the focusing characteristics an energy spread of 50 V and an energy deficit of 350 to 500 V could be inferred for the charged droplet beam.
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